To study the influence of individual characteristics on safety behavior of civil aviation maintenance personnels,and to improve their safe behaviors, the hypothetical model is built based on literature review and interview study. Through field research and surveys for first-line aviation maintenance personnels in domestic airline maintenance bases, structural equation model is used to analyze the data. Results show that self efficacy, safety attitude, safety awareness, safety knowledge, safety responsibility and safety values correlate with safety participation behavior and safety obedience behavior, among which self efficacy has the greatest influence on safety participation behavior, and safety awareness has the greatest influence on safety obedience behavior.